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Effect of ion irradiation on the structural properties and hardness of a-C:H:Si:O:F films | 134 |
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January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | June 2025 | July 2025 | |
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Effect of ion irradiation on the structural properties and hardness of a-C:H:Si:O:F films | 0 | 5 | 9 | 2 | 14 | 6 | 4 |
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