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| Deposition and etching of HMDSO/SF6 plasma polymerized thin films. | 115 |
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| December 2024 | January 2025 | February 2025 | March 2025 | April 2025 | May 2025 | June 2025 | |
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| Deposition and etching of HMDSO/SF6 plasma polymerized thin films. | 0 | 4 | 9 | 5 | 4 | 8 | 0 |
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