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| Nanohardness and contact angle of Si wafers implanted with N and C and Al alloy with N by plasma ion implantation | 184 |
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| September 2024 | October 2024 | November 2024 | December 2024 | January 2025 | February 2025 | March 2025 | |
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| Nanohardness and contact angle of Si wafers implanted with N and C and Al alloy with N by plasma ion implantation | 3 | 2 | 3 | 3 | 14 | 18 | 1 |
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