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Please use this identifier to cite or link to this item: http://acervodigital.unesp.br/handle/11449/123550
Title: 
Composite Thin Film Obtained Using Tetraethoxysilane and Aimed at VOCs Detection
Author(s): 
Institution: 
Universidade Estadual Paulista (UNESP)
ISSN: 
1662-9752
Abstract: 
The aim of this work was production of tetraethoxysilane (TEOS) plasma polymerized thin films and optimization of their physical-chemical characteristic for sensor development. The films were analyzed using several techniques. It was possible to produce composites (graphite clusters imbibed by silicon oxide film) made from only one reactant (TEOS). Deposition rate can vary significantly, reaching a maximum of 30 nm/min; cluster formation and their size widely depending on deposition parameters. The film surface was hydrophobic but can be wetted by organic compounds, probably due to carbon radicals. These films are good candidates for sensor development.
Issue Date: 
2012
Citation: 
Materials Science Forum, v. 730-732, p. 185-190, 2012.
Time Duration: 
185-190
Keywords: 
  • Composite
  • Plasma deposition
  • TEOS
URI: 
Access Rights: 
Acesso restrito
Type: 
outro
Source:
http://repositorio.unesp.br/handle/11449/123550
Appears in Collections:Artigos, TCCs, Teses e Dissertações da Unesp

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