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http://acervodigital.unesp.br/handle/11449/65803
- Title:
- Influence of heat treatment on LiNbO3 thin films prepared on Si(111) by the polymeric precursor method
- Universidade Federal de São Carlos (UFSCar)
- Universidade Estadual Paulista (UNESP)
- 0884-2914
- The effects of heat-treatment temperature on LiNbO3 thin films prepared by the polymeric precursor method were investigated. The precursor solution was deposited on Si(111) substrates by dip coating. X-ray diffraction and thermal analyses revealed that the crystallization process occurred at a low temperature (420 °C) and led to films with no preferential orientation. High-temperature treatments promoted formation of the LiNb3O8 phase. Scanning electron microscopy, coupled with energy dispersive spectroscopy analyses, showed that the treatment temperature also affected the film microstructure. The surface texture - homogeneous, smooth, and pore-free at low temperature - turned into an `islandlike' microstructure for high-temperature treatments.
- 1-Jul-1999
- Journal of Materials Research, v. 14, n. 7, p. 3115-3121, 1999.
- 3115-3121
- Crystal microstructure
- Crystal orientation
- Crystallization
- Ferroelectric materials
- Film preparation
- Heat treatment
- Lithium niobate
- Piezoelectric materials
- Silicon wafers
- Surface structure
- Thermal effects
- Thin films
- Polymeric precursor method
- Dielectric films
- http://dx.doi.org/10.1557/JMR.1999.0418
- Acesso restrito
- outro
- http://repositorio.unesp.br/handle/11449/65803
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