Measurement of phase differences between the diffracted orders of deep relief gratings

Abstract

Measurement of the phase difference between the 0th and the 1st transmitted diffraction orders of a symmetrical surface-relief grating recorded on a photoresist film is carried out by replacement of the grating in the same setup with which it was recorded. The measurement does not depend on lateral shifts of the replaced grating relative to the interference pattern, on environmental phase perturbations or on the wave-front quality of the interfering beams. The experimental data agree rather well with theoretical results calculated for sinusoidal profiled gratings. (C) 2003 Optical Society of America.