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Please use this identifier to cite or link to this item: http://acervodigital.unesp.br/handle/11449/36217
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dc.contributor.authorGelamo, R. V.-
dc.contributor.authorTrasferetti, B. C.-
dc.contributor.authorDurrant, S. F.-
dc.contributor.authorDavanzo, C. U.-
dc.contributor.authorRouxinol, F. P.-
dc.contributor.authorGadioli, G. Z.-
dc.contributor.authorBica de Moraes, M. A.-
dc.date.accessioned2014-05-20T15:25:54Z-
dc.date.accessioned2016-10-25T18:00:29Z-
dc.date.available2014-05-20T15:25:54Z-
dc.date.available2016-10-25T18:00:29Z-
dc.date.issued2006-08-01-
dc.identifierhttp://dx.doi.org/10.1016/j.nimb.2006.03.105-
dc.identifier.citationNuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials and Atoms. Amsterdam: Elsevier B.V., v. 249, p. 162-166, 2006.-
dc.identifier.issn0168-583X-
dc.identifier.urihttp://hdl.handle.net/11449/36217-
dc.identifier.urihttp://acervodigital.unesp.br/handle/11449/36217-
dc.description.abstractThis work illustrates the advantages of using p-polarized radiation at an incidence angle of 70 degrees in contrast to the conventional unpolarized beam at normal (or near-normal) incidence for the infrared spectroscopic study of polycarbosilane, polysilazane and polysiloxane thin films synthesized by plasma enhanced chemical vapor deposition (PECVD) and subsequently irradiated with 170 keV He+ ions at fluences from 1 x 10(14) to 1 x 10(16) cm(-2). Several bands not seen using the conventional mode could be observed in the polarized mode. (c) 2006 Elsevier B.V. All rights reserved.en
dc.format.extent162-166-
dc.language.isoeng-
dc.publisherElsevier B.V.-
dc.sourceWeb of Science-
dc.subjection irradiationpt
dc.subjectSi-based polymer filmpt
dc.subjectplasma polymerizationpt
dc.subjectchemical structurept
dc.subjectFTIRpt
dc.titleInfrared spectroscopy investigation of various plasma-deposited polymer films irradiated with 170 keV He+ ionsen
dc.typeoutro-
dc.contributor.institutionUniversidade Estadual de Campinas (UNICAMP)-
dc.contributor.institutionUniversidade Estadual Paulista (UNESP)-
dc.description.affiliationUniv Estadual Campinas, Dept Fis Aplicada, Inst Fis Gleb Wataghin, BR-13083970 Campinas, SP, Brazil-
dc.description.affiliationUniv Estadual Paulista, UNESP, Lab Plasmas Tecnol, BR-18087180 Sorocaba, SP, Brazil-
dc.description.affiliationUniv Estadual Campinas, Inst Quim, UNICAMP, BR-13083970 Campinas, SP, Brazil-
dc.description.affiliationUnespUniv Estadual Paulista, UNESP, Lab Plasmas Tecnol, BR-18087180 Sorocaba, SP, Brazil-
dc.identifier.doi10.1016/j.nimb.2006.03.105-
dc.identifier.wosWOS:000239545000042-
dc.rights.accessRightsAcesso restrito-
dc.relation.ispartofNuclear Instruments & Methods In Physics Research Section B-beam Interactions With Materials and Atoms-
dc.identifier.orcid0000-0002-4511-3768pt
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