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Please use this identifier to cite or link to this item: http://acervodigital.unesp.br/handle/11449/37920
Title: 
Deposition and etching of HMDSO/SF6 plasma polymerized thin films.
Author(s): 
Institution: 
Universidade Estadual Paulista (UNESP)
ISSN: 
0065-7727
Issue Date: 
13-Apr-1997
Citation: 
Abstracts of Papers of the American Chemical Society. Washington: Amer Chemical Soc, v. 213, p. 456-POLY, 1997.
Time Duration: 
456-POLY
Publisher: 
Amer Chemical Soc
URI: 
Access Rights: 
Acesso restrito
Type: 
outro
Source:
http://repositorio.unesp.br/handle/11449/37920
Appears in Collections:Artigos, TCCs, Teses e Dissertações da Unesp

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