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Please use this identifier to cite or link to this item: http://acervodigital.unesp.br/handle/11449/70217
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dc.contributor.authorMammana, S. S.-
dc.contributor.authorDegasperi, F. T.-
dc.contributor.authorSalvadori, M. C.-
dc.contributor.authorSparapani, D. C.-
dc.contributor.authorLaino, M. F.-
dc.contributor.authorRangel, R. C.-
dc.contributor.authorTeixeira, F. S.-
dc.contributor.authorCattani, M.-
dc.date.accessioned2014-05-27T11:22:45Z-
dc.date.accessioned2016-10-25T18:25:03Z-
dc.date.available2014-05-27T11:22:45Z-
dc.date.available2016-10-25T18:25:03Z-
dc.date.issued2007-12-19-
dc.identifierhttp://dx.doi.org/10.1116/1.2790924-
dc.identifier.citationJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, v. 25, n. 6, p. 1804-1807, 2007.-
dc.identifier.issn1071-1023-
dc.identifier.urihttp://hdl.handle.net/11449/70217-
dc.identifier.urihttp://acervodigital.unesp.br/handle/11449/70217-
dc.description.abstractIn this article, the authors measure throughput of sonic diamond microtubes and micronozzles that can work as passive gas flow controllers and flow meters under choking conditions. The behavior of the outlet pressure through the microdevices using an experimental setup with constant volume and constant temperature was determined in order to obtain the critical throughput, the critical mass flow rate, and the discharge coefficients of the diamond sonic microdevices. © 2007 American Vacuum Society.en
dc.format.extent1804-1807-
dc.language.isoeng-
dc.sourceScopus-
dc.subjectDiamonds-
dc.subjectFlow rate-
dc.subjectFlowmeters-
dc.subjectThroughput-
dc.subjectDischarge coefficients-
dc.subjectMicrodevices-
dc.subjectMicronozzles-
dc.subjectMicrotubes-
dc.subjectSonic flow-
dc.subjectFlow control-
dc.titleCritical parameter determination of sonic flow controller diamond microtubes and micronozzlesen
dc.typeoutro-
dc.contributor.institutionUniversidade de São Paulo (USP)-
dc.contributor.institutionUniversidade Estadual Paulista (UNESP)-
dc.description.affiliationInstitute of Physics University of São Paulo, CP 66318, CEP 05315-970 São Paulo, São Paulo-
dc.description.affiliationFaculdade de Tecnologia de São Paulo Centro Estadual de Educa̧ão Tecnológica Paula Souza (CEETEPS) UNESP-São Paulo, São Paulo-
dc.description.affiliationUnespFaculdade de Tecnologia de São Paulo Centro Estadual de Educa̧ão Tecnológica Paula Souza (CEETEPS) UNESP-São Paulo, São Paulo-
dc.identifier.doi10.1116/1.2790924-
dc.rights.accessRightsAcesso restrito-
dc.identifier.file2-s2.0-37149002798.pdf-
dc.relation.ispartofJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures-
dc.identifier.scopus2-s2.0-37149002798-
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